Facilities
at Semiconductor Physics Laboratory
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Deep Level Transient Spectroscopy (DLTS)
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Manual setup: Metrimpex deep level spectrometer
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Computerized setup with optical DLTS (ODLTS)
facility.
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Photoluminescence (PL) Spectroscopy
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Dispersive setup with 8-10K closed cycle refrigerator
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Fourier Transform Infrared (FTIR) Absorption
Spectroscopy
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Nicolet DX system FTIR spectrometer (fully computerized)
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Photocapacitance (PHCAP) Studies
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Czochralski Crystal Puller
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Diffusion/annealing Furnaces and other
processing facilities
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Thin Film Vacuum Coating Unit
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